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Ultraviolet/ozone cleaning of a soft x-ray grating contaminated by synchrotron radiation

Tatsuo Harada, Sumio Yamaguchi, Masaaki Itou, Shichirou Mitani, Hideki Maezawa, Akira Mikuni, Wataru Okamoto, and Hitoshi Yamaoka

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Abstract

A grating which was carbon contaminated by synchrotron radiation was cleaned using UV/ozone asher, and soft x-ray reflectivity was recovered into the original level after cleaning.

© 1991 Optical Society of America

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