Abstract

The optical constants, δ = 1 − n and k, of very thin gold films have been determined from the reflectance data obtained in the soft x-ray region of 60–900 eV. The gold films were prepared to various thicknesses, d = 49 − 270 Å, by ion beam sputtering (IBS) and electron beam evaporation (EB). A plane parallel slab model with due considerations for the surface and the interface roughness was employed to analyze the reflectance data by least-squares curve fitting. The optical constants determined for the BS samples definitely show their dependence on the film thickness. It is also found that δ of the 201-Å thick IBS film is smaller by ~10% than that of the EB film of 212 Å thick.

© 1991 Optical Society of America

Simultaneous determination of the optical constants and thickness of very thin films by using soft-x-ray reflectance measurements

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