Abstract

Blazed reflection diffractive microlenses potentially have many uses. The fabrication accuracy and the optical characteristics of these microlenses can be greatly improved compared with transmission diffractive microlenses. The reflection microlenses for oblique incidence can be flexibly used without a beam splitter. The functions of the electron-beam writing system that we developed have been expanded so that the diffraction-limited microlenses for oblique incidence can be fabricated. It is demonstrated that the fabricated microlens exhibits diffraction-limited focusing characteristics with 78% high efficiency at a large oblique angle of 30°. These microlenses could be used as key devices in planar optics and optical interconnections.

© 1991 Optical Society of America

High-efficiency blazed diffractive optical elements for the violet wavelength fabricated by electron-beam lithography

Teruhiro Shiono, Tetsuya Hamamoto, and Koji Takahara
Appl. Opt. 41(13) 2390-2393 (2002)

Reflection aspherical microlenses for planar optics fabricated by electron-beam lithography

Teruhiro Shiono and Hisahito Ogawa
Opt. Lett. 17(8) 565-567 (1992)

Reflection micro-Fresnel lenses and their use in an integrated focus sensor

Teruhiro Shiono, Masatoshi Kitagawa, Kentaro Setsune, and Tsuneo Mitsuyu
Appl. Opt. 28(16) 3434-3442 (1989)

Quasi-toric planar microlenses for oblique-incidence light beams

Hisakazu Kurita and Shigeru Kawai
Appl. Opt. 36(5) 1017-1022 (1997)

Planar-optic-disk pickup with diffractive micro-optics

Teruhiro Shiono and Hisahito Ogawa
Appl. Opt. 33(31) 7350-7355 (1994)