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Extreme ultraviolet transmission of a synthetic diamond thin film

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Abstract

The transmission of a thin film of synthetic diamond was measured at υarious waυelengths in the extreme ultraυiolet. The measurements agree with a prediction based on published carbon attenuation coefficients assuming the density of natural diamond. A better fit to the data results when an additional ~200-Å layer of silicon is included in the model. It is belieυed that this silicon layer exists as silicon carbide.

© 1991 Optical Society of America

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