Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Stress, scatter, and structure dependence on composition of thin films of Si–YF3 and ZnSe–SrF2

Not Accessible

Your library or personal account may give you access

Abstract

Composition dependent structural, optical, and mechanical properties of codeposited thin films were studied in the Si–YF3 and ZnSe–SrF2 systems. Intrinsic stress varies nonlinearly in both systems. In the Si–YF3 system, the stress becomes slightly compressive for intermediate compositions, even though it is highly tensile in the pure constituent thin films. In the ZnSe–SrF2 system, optical scatter and intrinsic stress exhibit abrupt changes at ~60-vol % SrF2, accompanied by a change in the dominant crystalline orientation. Possible structure–property relationships and composition ranges for practical applications of thick films are also discussed.

© 1991 Optical Society of America

Full Article  |  PDF Article
More Like This
Properties of mixed composition Si/ZnSe and ZnSe/LaF3 infrared optical thin films

Natalie S. Gluck, Donald B. Taber, James P. Heuer, Randolph L. Hall, and William J. Gunning
Appl. Opt. 31(28) 6127-6132 (1992)

Intrinsic stress and structural properties of mixed composition thin films

Haluk Sankur, William J. Gunning, and Jeffrey F. DeNatale
Appl. Opt. 27(8) 1564-1567 (1988)

TiO2-Ta2O5 composite thin films deposited by radio frequency ion-beam sputtering

Cheng-Chung Lee and Chien-Jen Tang
Appl. Opt. 45(36) 9125-9131 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (6)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved