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Design issues and development of monolithic silicon/lead lanthanum zirconate titanate integration technologies for smart spatial light modulators

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Abstract

System, device, and material issues for the design and realization of smart spatial light modulators are discussed. Silicon and lead lanthanum zirconate titanate (PLZT) are two promising materials that meet the system requirements. Two different technologies for the integration of Si and PLZT are described. Results show that large-scale smart spatial light modulators can be realized with Si/PLZT technologies.

© 1992 Optical Society of America

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