Abstract

The intensity that locates the image of an edge in a confocal microscope is calculated as a function of detector size. Both pinhole and slit detectors are considered. Knowledge of this edge-setting criterion permits accurate determination of the edge position, as is necessary for confocal metrology.

© 1992 Optical Society of America

Effects of defocus and primary spherical aberration on images of a straight edge in confocal microscopy

Min Gu and Colin J. R. Sheppard
Appl. Opt. 33(4) 625-630 (1994)

Dependence of two- and three-dimensional optical transfer functions on pinhole radius in a coherent confocal microscope

Valter Drazic
J. Opt. Soc. Am. A 9(5) 725-731 (1992)

Fiber-optic confocal microscope: FOCON

Tim Dabbs and Monty Glass
Appl. Opt. 31(16) 3030-3035 (1992)

Image of a straight edge in confocal self-interference microscopy

DongKyun Kang and DaeGab Gweon
Opt. Lett. 30(13) 1650-1653 (2005)

Improvement in resolution by nearly confocal microscopy

I. J. Cox, C. J. R. Sheppard, and T. Wilson
Appl. Opt. 21(5) 778-781 (1982)