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Differential amplitude scanning optical microscope computer aided for linewidth measurements

E. A. Bozhevolnaya, S. I. Bozhevolnyi, and A. V. Postnikov

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Abstract

A computer-aided differential amplitude scanning optical microscope for accurate linewidth measurements is described. The operation of the system includes an experimental data treatment based on the correspondent image formation theory. Experimental results for a three-track structure are presented. The developed technique is shown to be capable of measuring submicrometer linewidths with nanometer accuracy.

© 1992 Optical Society of America

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