Abstract

The influence of vibration on dynamic measurements of microdiameters using a laser diffraction–CCD detection system is studied. The theoretical analysis indicates that the influence of vibration on the diffraction pattern of a measured object introduces significant errors into its diameter measurement, and the improvement can be approached by using a TEM₀₀ Gaussian incident beam instead of the usual uniform beam. The experimental results of these cases are also presented and in good accordance with the theoretical analysis.

© 1993 Optical Society of America

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