Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Deposition error compensation for optical multilayer coatings. II. Experimental results—sputtering system

Not Accessible

Your library or personal account may give you access

Abstract

A fully automated magnetron-sputtering system for the deposition of complicated optical multilayer structures is described. The process control includes the real-time determination of the deposited layer thicknesses and adjustment of the remaining layer thicknesses to reoptimize the final performance of the multilayer system. With this deposition system it should be possible to produce almost any all-dielectric filter that can be designed, subject only to limitations imposed by time, cost, and mechanical stability of the coatings. To demonstrate the performance of the deposition system, five complex multilayer systems were fabricated. The theoretical and measured spectral transmittance curves of these multilayer systems closely agree with one another over broad spectral regions. The equipment is capable of unattended operation over periods of 24 h or more.

© 1993 Optical Society of America

Full Article  |  PDF Article
More Like This
Deposition error compensation for optical multilayer coatings. I. Theoretical description

Brian T. Sullivan and J. A. Dobrowolski
Appl. Opt. 31(19) 3821-3835 (1992)

Practical magnetron sputtering system for the deposition of optical multilayer coatings

J. A. Dobrowolski, James R. Pekelsky, R. Pelletier, M. Ranger, Brian T. Sullivan, and A. J. Waldorf
Appl. Opt. 31(19) 3784-3789 (1992)

High-rate automated deposition system for the manufacture of complex multilayer coatings

Brian T. Sullivan, Glenn A. Clarke, Takayuki Akiyama, Norman Osborne, Martial Ranger, J. A. Dobrowolski, Louisa Howe, Akira Matsumoto, Yizhou Song, and Kazuo Kikuchi
Appl. Opt. 39(1) 157-167 (2000)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (12)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved