Add to BibSonomyAbstract
A concave diffraction grating (2400 grooves/mm) coated with a Si/Mo multilayer has an efficiency of 2.5% at 290 Å and a resolving power of 14,000 in third order of 156 Å.
© 1993 Optical Society of America
Full Article | PDF ArticleMore Like This
On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136–142-Å wavelength region and near normal incidence
J. F. Seely, M. P. Kowalski, W. R. Hunter, J. C. Rife, T. W. Barbee, G. E. Holland, C. N. Boyer, and C. M. Brown
Appl. Opt. 32(25) 4890-4897 (1993)
High-efficiency MoRu–Be multilayer-coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range
John F. Seely, Claude Montcalm, Sherry Baker, and Saša Bajt
Appl. Opt. 40(31) 5565-5574 (2001)
Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm
Benjawan Sae-Lao, Saša Bajt, Claude Montcalm, and John F. Seely
Appl. Opt. 41(13) 2394-2400 (2002)