Abstract

A design of a diode-pumped Nd:YAG laser for use as the driver for a soft-x-ray projection lithography system is described. This laser will output up to 1 J per pulse with a 2- to 5-ns pulse duration and a 400-Hz pulse repetition rate. The design employs microchannel-cooled diode laser arrays, zigzag slab energy storage, a regenerative amplifier cavity that uses phase conjugator beam correction for near-diffraction-limited beam quality, and stimulated Brillouin scattering pulse compression to achieve the required pulse length.

© 1993 Optical Society of America

Characterization and control of laser plasma flux parameters for soft-x-ray projection lithography

Martin Richardson, William T. Silfvast, Howard A. Bender, Art Hanzo, Victor P. Yanovsky, Feng Jin, and Jerry Thorpe
Appl. Opt. 32(34) 6901-6910 (1993)

Front-end design issues in soft-x-ray projection lithography

Natale M. Ceglio, Andrew M. Hawryluk, and Gary E. Sommargren
Appl. Opt. 32(34) 7050-7056 (1993)

Wavelength considerations in soft-x-ray projection lithography

Andrew M. Hawryluk and Natale M. Ceglio
Appl. Opt. 32(34) 7062-7067 (1993)

Condenser optics, partial coherence, and imaging for soft-x-ray projection lithography

Gary E. Sommargren and Lynn G. Seppala
Appl. Opt. 32(34) 6938-6944 (1993)

Prototype high-speed tape target transport for a laser plasma soft-x-ray projection lithography source

Steven J. Haney, Kurt W. Berger, Glenn D. Kubiak, Paul D. Rockett, and John Hunter
Appl. Opt. 32(34) 6934-6937 (1993)