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Soft-x-ray projection imaging with a 1:1 ring-field optic

A. A. MacDowell, J. E. Bjorkholm, K. Early, R. R. Freeman, M. D. Himel, P. P. Mulgrew, L. H. Szeto, D. W. Taylor, D. M. Tennant, O. R. Wood, J. Bokor, L. Eichner, T. E. Jewell, W. K. Waskiewicz, D. L. White, D. L. Windt, R. M. D’Souza, W. T. Silfvast, and F. Zernike

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Abstract

A molybdenum/silicon multilayer-coated 1:1 ring-field optic with a numerical aperture of 0.0835 is used to carry out soft-x-ray projection imaging with undulator radiation at 12.9 nm. An ideal optic of this type should be able to image 0.1-μm features with a contrast exceeding 90% at this wavelength. The useful resolution of our ring-field optic is experimentally found to be approximately 0.2 μm, probably because of the presence of substrate figuring errors.

© 1993 Optical Society of America

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