Effects on profile depth of changes in the thickness of the photoresist layers

Arturo Olivares-Pérez; Daniel Malacara; Cristina E. Solano S.; J. P. Isaksen

doi:10.1364/AO.33.002043

Applied Optics
Vol. 33,
Issue 10,
pp. 2043-2047
(1994)
•https://doi.org/10.1364/AO.33.002043

Effects on profile depth of changes in the thickness of the photoresist layers

Arturo Olivares-Pérez, Daniel Malacara, Cristina E. Solano S., and J. P. Isaksen

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Arturo Olivares-Pérez, Daniel Malacara, Cristina E. Solano S., and J. P. Isaksen, "Effects on profile depth of changes in the thickness of the photoresist layers," Appl. Opt. 33, 2043-2047 (1994)

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Abstract

We propose a model to describe the behavior of the absorption profile as a function of the thickness changes of the photoresist layers (Shipley 1350-J), used to make high-quality holographic elements. We also show that the surface topology of the substrate is an important parameter that modulates the layer’s thickness on the substrate. We obtain a depth modulation Δd in the exposure time (assuming a uniform irradiance), which is brought about by changes in the thickness of the photoresist layers at different points on the substrate; the thickness parameter is a function of the absorption coefficient of the photoresist.

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a_0,0 = 33.67042	a_0,1 = 35.25818	a_0,2 = 1.714136	a_0,3 = 1.626904
a_0,4 = 3.673016	a_0,5 = −3.049927	a_0,6 = −0.753406	a_0,7 = 1.631195
a_1,0 = 30.17721	a_1,1 = 21.12781	a_1,2 = −16.20138	a_1,3 = 4.268878
a_1,4 = 4.841420	a_1,5 = −3.056755	a_1,6 = 1.351357	a_1,7 = −4.122864
a_2,0 = 5.491031	a_2,1 = 0.3527231	a_2,2 = −7.233415	a_2,3 = −3.861239
a_2,4 = −1.247746	a_2,5 = −1.489803	a_2,6 = 0.3473030	a_2,7 = 1.229843
a_3,0 = −0.546375	a_3,1 = −4.280455	a_3,2 = −5.564775	a_3,3 = −1.208201
a_3,4 = 0.6930649	a_3,5 = 0.5625248	a_3,6 = 1.539513	a_3,7 = 0.6981201
a_4.0 = 1.784847	a_4,1 = 3.218253	a_4,2 = 2.247544	a_4,3 = 1.820879
a_4,4 = 0.3932607	a_4,5 = −0.362604	a_4,6 = −0.289892	a_4,7 = −0.9325733
a_5,0 = −1.515988	a₅₁ = −2.439372	a_5,2 = −0.674382	a_5,3 = 1.698444
a₅₄ = 1.656291	a₅₅ = 0.2676306	a_5,6 = −0.310046	a_5,7 = −0.6230774
a_6,0 = −1.869399	a_6,1 = −3.149276	a_6,2 = −1.090059	a_6,3 = 0.3107891
a_6,4 = 0.8011840	a_6,5 = 0.4921214	a_6,6 = −0.004241	a_6,7 = 0.0076056
a_7,0 = 1.415016	a_7,1 = 3.275449	a_7,2 = 3.072470	a_7,3 = −0.6370760
a_7,4 = −1.973025	a_7,5 = −0.724475	a_7,6 = −0.526947	a_7,7 = −0.0067138
a_8,0 = 0.2342077	a_8,1 = −0.706966	a_8,2 = −2.025421	a_8,3 = −1.199389
a_8,4 = −0.190035	a_8,5 = 0.0069786	a_8,6 = 0.7894064	a_8,7 = 0.7453308
a_9,0 = 0.2931731	a_9,1 = 2.726078	a_9,2 = 3.964131	a_9,3 = 1.089460
a_9,4 = −0.725012	a_9,5 = −0.393257	a_9,6 = −0.693260	a_9,7 = −0.6221848
a_10,0 = −3.723413	a_10,1 = −5.299873	a_10,2 = −1.847833	a_10,3 = 0.8486529
a_10,4 = 1.518571	a_10,5 = 0.9120436	a_10,6 = 0.3261064	a_10,7 = −0.004194
a_11,0 = −0.668048	a_11,1= 1.443410	a_11,2 = 3.883076	a_11,3 = 1.077642
a_11,4 = −0.837586	a_11,5 = −0.337902	a_11,6 = −0.990554	a_11,7 = −0.881729

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Applied Optics