Abstract

Transmission ellipsometry measures the real and imaginary parts of the ratio τ = t _p/t _s, where t _p and t _s are the transmission amplitudes for the p and s polarizations. For a homogeneous layer, the unknowns to be determined are the layer dielectric constant ɛ = n ² and the layer thickness Δz. For nonabsorbing films the thickness can be eliminated, and an algebraic equation for ɛ results. This equation is reduced to a quadratic equation. The thickness is then analytically determined also. The effect of measurement errors on the deduced dielectric constant and layer thickness is discussed. Inversion of thin-film data is also considered.

© 1994 Optical Society of America

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