Abstract

An original (to the best of our knowledge) method to achieve azimuthal alignments of all polarizing components in ellipsometry is presented. It is an accurate nulling method, and it is easy to implement and can be used with any isotropic reflecting layer. It also allows one to check the eventual presence of surface anisotropy. The ferrofluid modulator used in this setup is briefly described. Measurements made for three reflecting surfaces (fused silica, silicon, and germanium) are presented.

© 1994 Optical Society of America

Method for azimuthal alignment in fixed-angle ellipsometry

B. J. Stagg and T. T. Charalampopoulos
Appl. Opt. 31(4) 479-484 (1992)

High-accuracy and rapid azimuth calibration for polarizing elements in ellipsometry by differential spectral analysis on the ellipse azimuth

Huatian Tu, Yuxiang Zheng, Yao Shan, Yao Chen, Haotian Zhang, Rongjun Zhang, Songyou Wang, YoungPak Lee, and Liangyao Chen
Appl. Opt. 60(6) 1609-1614 (2021)

Analytical solutions of the azimuthal deviation of a polarizer and an analyzer by polarizer-sample-analyzer ellipsometry

Yu Faye Chao, Kan Yan Lee, and Yi De Lin
Appl. Opt. 45(17) 3935-3939 (2006)

Alignment method for rotating analyzer ellipsometry

Shuichi Kawabata
J. Opt. Soc. Am. A 4(4) 664-670 (1987)

Mueller-matrix ellipsometry using the division-of-amplitude photopolarimeter: a study of depolarization effects

Shankar Krishnan and Paul C. Nordine
Appl. Opt. 33(19) 4184-4192 (1994)