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Optical transfer function of slit-coupled axial systems

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Abstract

We studied the influence that aberrations and diffraction have on the quality of the image of a generic family of slit-coupled axisymmetric systems when both effects are competitive. We evaluated the modulation optical transfer function of these systems for small amounts of individual third-order aberrations and different widths of the intermediate slit that couples both stages.

© 1995 Optical Society of America

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