Abstract

We have used a kinoform to increase the beam-power utilization in an excimer-laser-machining experiment. The kinoform creates the pattern to be machined. Thus less power is wasted on the blocking parts of a shadow mask. To achieve as smooth an intensity profile as possible, the kinoform was also used together with a microlens-array beam homogenizer. We discuss the intensity distributions of the patterns created by the kinoform with and without the beam homogenizer as well as the design of the kinoform and the homogenizer, with emphasis on the relation to the coherence properties of the laser beam.

© 1995 Optical Society of America

Nd:YAG laser machining with multilevel resist kinoforms

Mats Ekberg, Michael Larsson, Aldo Bolle, and Sverker Hård
Appl. Opt. 30(25) 3604-3606 (1991)

Simultaneous machining of parallel grooves in SnO₂ thin films using a Nd:YAG laser and a kinoform

Anna-Karin Holmér
Appl. Opt. 35(15) 2614-2618 (1996)

Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

Fredrik Nikolajeff, Sverker Hård, and Bernard Curtis
Appl. Opt. 36(32) 8481-8489 (1997)

Speckle-noise reduction on kinoform reconstruction using a phase-only spatial light modulator

Jun Amako, Hirotsuna Miura, and Tomio Sonehara
Appl. Opt. 34(17) 3165-3171 (1995)

Kinoform-only Gaussian-to-rectangle beam shaper for a semiconductor laser

Jörgen Bengtsson
Appl. Opt. 35(20) 3807-3814 (1996)