Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Determination of refractive index and thickness of thick transparent films by variable-angle spectroscopic ellipsometry: application to benzocyclobutene films

Not Accessible

Your library or personal account may give you access

Abstract

An analysis procedure for evaluating the refractive index and the thickness of 5−10-μm-thick transparent films has been developed based on variable-angle spectroscopic ellipsometry. As an example of application, results from an analysis of benzocyclobutene films are presented. The sensitivities in Ψ and Δ with respect to the refractive index and the thickness of the films are also discussed.

© 1996 Optical Society of America

Full Article  |  PDF Article
More Like This
Numerical algorithm for spectroscopic ellipsometry of thick transparent films

Salvador Bosch, Julio Pérez, and Adolf Canillas
Appl. Opt. 37(7) 1177-1179 (1998)

Estimate of the degree of inhomogeneity of the refractive index of dielectric films from spectroscopic ellipsometry

G. Parjadis de Larivière, J. M. Frigerio, J. Rivory, and F. Abelès
Appl. Opt. 31(28) 6056-6061 (1992)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (9)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved