Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Optimization of the output beam homogeneity of short-pulse KrF amplifiers

Not Accessible

Your library or personal account may give you access

Abstract

The output beam of short-pulse excimer amplifiers exhibits an inhomogeneous spatial intensity distribution caused by diffraction effects at laser windows and mirrors. Theoretical and experimental studies show that the amplification parameters of a KrF amplifier can be optimized with respect to the output beam homogeneity by proper choice of the energy density in the amplifier. The homogenized intensity distribution is obtained at the plane of the output window of the amplifier and can be transferred by optical imaging onto a target plane. It is shown that the amplification parameters for the best output homogeneity are close to the ones previously found for optimal energy extraction efficiency.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Optimization of a beam delivery system for a short-pulse KrF laser used for material ablation

Paolo Dainesi, Jürgen Ihlemann, and Peter Simon
Appl. Opt. 36(27) 7080-7085 (1997)

High-power sub-100-fs UV pulse generation from a spectrally controlled KrF laser

Y. Nabekawa, Y. Kuramoto, T. Sekikawa, and S. Watanabe
Opt. Lett. 22(10) 724-726 (1997)

Diffractive microlenses replicated in fused silica for excimer laser-beam homogenizing

Fredrik Nikolajeff, Sverker Hård, and Bernard Curtis
Appl. Opt. 36(32) 8481-8489 (1997)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved