Abstract

A portable electro-optical system capable of real-time measurements of surface slope distortions down to 0.5 µrad is described; the system is limited primarily by its short-term stability. The system employs an angle measurement technique that, in combination with the least-squares signal extraction method, reduces system fluctuations. In addition, a multireflection technique is used to enhance the detectable resolution. Although designed for use with mirrors for synchrotron radiation sources, this system has the flexibility to be applied to other optical components. The prototype system has been tested on a sample mirror piece, and preliminary results are presented. A brief discussion about the extension of this metrology unit to adaptive optics is also given.

© 1997 Optical Society of America

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