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Double-wavelength superheterodyne interferometer for absolute ranging with submillimeter resolution: results obtained with a demonstration model by use of rough and reflective targets

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Abstract

The potential of double-wavelength interferometry is well known, especially regarding the capability of performing absolute distance measurements of rough targets with high resolutions. We describe the experimental results obtained with a demonstration model of a double-wavelength interferometer with superheterodyne detection. Our system, implemented with two four-quadrant detectors to improve the detection probability, has demonstrated the ability to reach resolutions of 0.2 mm at 5-m distances on rough targets in 50-ms integration time.

© 1997 Optical Society of America

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