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Detection of defects in multiple-layer structures by using surface plasmon resonance

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Abstract

A method for diagnosing a silver–dielectric interface is proposed. This method relies on surface plasmon resonance at the Ag–dielectric interface. It yields a good estimate of an air gap between a thin Ag film and a polymer (dielectric). Detection of an air gap thickness of approximately half of the incident probing beam wavelength was monitored. Probing a small air gap is also discussed in the case of poor adhesion at the Ag–polymer interface.

© 1997 Optical Society of America

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