Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Comparison of the calculated and the measured efficiencies of a normal-incidence grating in the 125–225-Å wavelength range

Not Accessible

Your library or personal account may give you access

Abstract

The efficiency of a diffraction grating was measured near normal incidence in the 125–225-Å wavelength range with synchrotron radiation. The grating pattern had 2400 grooves/mm and was recorded on a concave fused-silica blank by a holographic technique. The grooves were shaped by ion-beam etching to provide a facet with a blaze angle of 2.5° as determined by atomic force microscopy. Because of the characteristics of the etching process the groove profile was approximately triangular, with the other facet inclined at an angle of 5.5° to the surface. The measured efficiency was compared with the efficiency calculated by a computer program, small enough to run on a personal computer, that solved the periodic boundary-value problem corresponding to electromagnetic radiation incident on a diffraction grating with finite conductivity. The calculation was based on the nominal groove profile that was determined by atomic force microscopy. The measured and the calculated efficiencies were in good agreement. This investigation indicates that the diffraction efficiency of a normal-incidence grating can be calculated in the soft-x-ray region with a personal computer.

© 1997 Optical Society of America

Full Article  |  PDF Article
More Like This
Thin-film interference effects on the efficiency of a normal-incidence grating in the 100–350-Å wavelength region

John F. Seely, Leonid I. Goray, William R. Hunter, and Jack C. Rife
Appl. Opt. 38(7) 1251-1258 (1999)

Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-Å wavelength region

J. F. Seely, M. P. Kowalski, R. G. Cruddace, K. F. Heidemann, U. Heinzmann, U. Kleineberg, K. Osterried, D. Menke, J. C. Rife, and W. R. Hunter
Appl. Opt. 36(31) 8206-8213 (1997)

Normal-incidence efficiencies of 4800-grooves/mm-ruled replica gratings with multilayer and gold coatings in the 125–325-Å wavelength region

John F. Seely, Tetsuya Watanabe, Tatsuo Harada, Jack C. Rife, and William R. Hunter
Appl. Opt. 38(10) 1920-1925 (1999)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved