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Continuous calibration of a vacuum ultraviolet system from 65 to 125 nm by a cascade arc and comparison with the calibrated line radiation of a hollow cathode

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Abstract

A high-power stationary helium cascade arc has been developed as a standard source for continuum radiation in the VUV spectral range from 65 to 125 nm. The calibration of the VUV system response was based on the calculated and measured continuum radiation of a 2-mmϕ pure He arc. Diagnostics of the arc plasma in partial thermal equilibrium yielded the electron density and the temperature that were inserted in the calculations of the continuous radiation. The results were compared with the helium, argon, and krypton radiation lines of a high-current hollow cathode lamp. This lamp was built according to the construction drawings of a hollow cathode, which was calibrated by means of the electron synchrotron radiation at the Physikalisch Technische Bundesanstalt Berlin.

© 1997 Optical Society of America

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