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Spatial-mode control of vertical-cavity lasers with micromirrors fabricated and replicated in semiconductor materials

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Abstract

Micromirrors were fabricated in gallium phosphide by mass transport to provide spatial-mode control of vertical-cavity surface-emitting lasers (VCSEL’s). The concave mirrors were used in an external-cavity configuration to provide spatial filtering in the far field. Single-mode cw lasing was demonstrated in 15-µm-diameter VCSEL’s with currents as high as 6 times threshold. The fabrication process was extended to micromirrors in gallium arsenide by use of a replication and dry-etch transfer process.

© 1999 Optical Society of America

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