A compact holographic projector system was built and
tested. This projection system offers a practical approach for
making a highly corrected mesh or grid pattern on curved
surfaces. The pattern can range in size from multimicrometer to
submicrometer dimensions and be recorded in either positive or negative
photoresist. Standing-wave interference patterns in the form of a
diverging close-packed lattice of either hexagonal or square rodlike
intensity maxima extending outward from a point or a locus of points
are produced by multiple-beam holography that involves the combination
of a holographic diffraction grating and a hypercomatic focusing
objective.
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Aspheric CoefficientshA, B, C, and D and Codes ac, bc, cc, and dc for Lens Surfaces 17 and 18
Lens Surface
Coefficient
Coefficient Code
A
B
C
D
ac
bc
cc
dc
17
-0.700502 × 10-6
0.864616 × 10-10
0.000000 × 100
0.000000 × 100
100
100
100
100
18
0.682884 × 10-8
-0.353346 × 10-11
0.000000 × 100
0.000000 × 100
100
100
100
100
Aperture Data: Cir, circular; Si, surface i.
Aperture
Aperture Type
Radius (mm)
Aperture
Aperture Type
Radius (mm)
CIR S2
Clear aperture (ca)
2.000000
CIR S14
Clear aperture (ca)
100.000000
CIR S3
Clear aperture (ca)
2.000000
CIR S16
Clear aperture (ca)
85.000000
CIR S4
Clear aperture (ca)
2.000000
CIR S17
Clear aperture (ca)
85.000000
CIR S5
Clear aperture (ca)
2.000000
CIR S18
Clear aperture (ca)
85.000000
CIR S7
Clear aperture (ca)
100.000000
CIR S19
Clear aperture (ca)
85.000000
CIR S8
Clear aperture (ca)
100.000000
CIR S16
Clear aperture (ca)
100.000000
CIR S9
Clear aperture (ca)
100.000000
CIR S17
Edge aperture (EDG)
100.000000
CIR S10
Clear aperture (ca)
100.000000
CIR S18
Edge aperture (EDG)
100.000000
CIR S11
Clear aperture (ca)
100.000000
CIR S19
Edge aperture (EDG)
100.000000
CIR S12
Clear aperture (ca)
100.000000
Edge aperture (EDG)
100.000000
Illuminator Specification Data
Entrance pupil diameter (EPD)
0.76676 mm
Wavelength (wl)
363.789 nm
Infinite Conjugates
Paraxial Image
Effective focal length (efl)
223.5276 mm
Height (ht)
0.0000 mm
Back focal length (bfl)
-85586.9006 mm
Angle (ang)
0.0000°
Front focal length (ffl)
21.0190 mm
Entrance Pupil
f-Number (fno)
291.5224
Diameter (dia)
0.7668 mm
Image distance (img dis)
25.4000 mm
Thickness (thi)
0.0000 mm
Overall length (oal)
1896.5274 mm
Exit Pupil
Diameter (dia)
8.1541 mm
Thickness (thi)
-83209.7851 mm
The labels used in this table
correspond to those used in code v, e.g., sto
refers to the first, or stop, lens surface after the image,
the numbers in column one under object designate the front and back
surfaces of each lens element, and last refers to the last
surface or the image. When labels have been used instead of the
code v abbreviation, the abbreviation is included in small
capitals following the label.
Refractive indices are given at the
design wavelength of 363.789 nm. special indicates that
the material used is not in a specific code v
manufacturer’s catalog but is in the code v special
catalog for miscellaneous glasses and other optical materials.
The k control code
refers to whether K is a variable when optimized; a value of
100 means that it is not and a value of 0 that it is.
For the intersect code, a
yes entry indicates that the standard intersect code, in
which the intersection is the one closest to the surface vertex, was
used, a no entry indicates that the other intersection was
used.
For the cuf, a nonzero
value indicates a Fresnel surface.
The ccf refers to
whether the cuf is a variable when optimized; the values
and their meanings are the same as those for the k control
code.
The coefficients A, B, C,
and D are the fourth, sixth, eighth, and tenth polynomial
aspheric sag coefficients, respectively, to the conic constant. The
codes ac–dc, like the k control code, indicate
whether the coefficients are variables when optimized; the values and
their meanings are the same as those for the k control
code.
Table 2
Lens Data for the Hypercomatic (Immersion)
Objectivea
Current Lens Surface with Respect to the Object (>obj)
Aspheric Coefficients A, B, C, and D and Codes ac, bc, cc, and dc for Lens Surface 4
Lens Surface
Coefficients
Coefficient Code
A
B
C
D
ac
bc
cc
dc
4
0.000000 × 100
-313517 × 10-11
0.000000 × 100
0.000000 × 100
100
0
100
100
Illuminator Specification Data
Entrance pupil diameter (epd)
150.00000 mm
Wavelength (wl)
363.789 nm
Field angles in the x direction (xan)
0.00000°
0.00000°
Paraxial Image
Field angles in the y direction (yan)
0.25000°
-0.25000°
Height (ht)
0.1818 mm
Upper vignetting factor in the y direction (vuy)
0.00000
0.00000
Angle (ang)
0.2500°
Lower vignetting factor in the y direction (vly)
0.00000
0.00000
Entrance Pupil
Infinite Conjugates
Diameter (dia)
150.0000 mm
Effective focal length (efl)
63.4941 mm
Thickness (thi)
0.0000 mm
Back focal length (bfl)
1.0006 mm
Exit Pupil
Front focal length (ffl)
60.8890 mm
Diameter (dia)
102.6521 mm
f-Number (fno)
0.2778
Thickness (thi)
44.4526 mm
Image distance (img dis)
1.0000 mm
Overall length (oal)
155.4195 mm
The labels and names used in this table
correspond to those used in code v; for clarity,
abbreviations (in small capitals) have been included in parentheses
following some entries. See Table 1 footnotes for particular
definitions and explanations of values.
Refractive indices are given at the design
wavelength of 363.789 nm.
Tables (2)
Table 1
Lens Data for the Illuminator Section of the Holographic
Projector System when Configured End to End and Scaled to 150 mm
Outa
Current Lens Surface with Respect to the Object (>obj)
Aspheric CoefficientshA, B, C, and D and Codes ac, bc, cc, and dc for Lens Surfaces 17 and 18
Lens Surface
Coefficient
Coefficient Code
A
B
C
D
ac
bc
cc
dc
17
-0.700502 × 10-6
0.864616 × 10-10
0.000000 × 100
0.000000 × 100
100
100
100
100
18
0.682884 × 10-8
-0.353346 × 10-11
0.000000 × 100
0.000000 × 100
100
100
100
100
Aperture Data: Cir, circular; Si, surface i.
Aperture
Aperture Type
Radius (mm)
Aperture
Aperture Type
Radius (mm)
CIR S2
Clear aperture (ca)
2.000000
CIR S14
Clear aperture (ca)
100.000000
CIR S3
Clear aperture (ca)
2.000000
CIR S16
Clear aperture (ca)
85.000000
CIR S4
Clear aperture (ca)
2.000000
CIR S17
Clear aperture (ca)
85.000000
CIR S5
Clear aperture (ca)
2.000000
CIR S18
Clear aperture (ca)
85.000000
CIR S7
Clear aperture (ca)
100.000000
CIR S19
Clear aperture (ca)
85.000000
CIR S8
Clear aperture (ca)
100.000000
CIR S16
Clear aperture (ca)
100.000000
CIR S9
Clear aperture (ca)
100.000000
CIR S17
Edge aperture (EDG)
100.000000
CIR S10
Clear aperture (ca)
100.000000
CIR S18
Edge aperture (EDG)
100.000000
CIR S11
Clear aperture (ca)
100.000000
CIR S19
Edge aperture (EDG)
100.000000
CIR S12
Clear aperture (ca)
100.000000
Edge aperture (EDG)
100.000000
Illuminator Specification Data
Entrance pupil diameter (EPD)
0.76676 mm
Wavelength (wl)
363.789 nm
Infinite Conjugates
Paraxial Image
Effective focal length (efl)
223.5276 mm
Height (ht)
0.0000 mm
Back focal length (bfl)
-85586.9006 mm
Angle (ang)
0.0000°
Front focal length (ffl)
21.0190 mm
Entrance Pupil
f-Number (fno)
291.5224
Diameter (dia)
0.7668 mm
Image distance (img dis)
25.4000 mm
Thickness (thi)
0.0000 mm
Overall length (oal)
1896.5274 mm
Exit Pupil
Diameter (dia)
8.1541 mm
Thickness (thi)
-83209.7851 mm
The labels used in this table
correspond to those used in code v, e.g., sto
refers to the first, or stop, lens surface after the image,
the numbers in column one under object designate the front and back
surfaces of each lens element, and last refers to the last
surface or the image. When labels have been used instead of the
code v abbreviation, the abbreviation is included in small
capitals following the label.
Refractive indices are given at the
design wavelength of 363.789 nm. special indicates that
the material used is not in a specific code v
manufacturer’s catalog but is in the code v special
catalog for miscellaneous glasses and other optical materials.
The k control code
refers to whether K is a variable when optimized; a value of
100 means that it is not and a value of 0 that it is.
For the intersect code, a
yes entry indicates that the standard intersect code, in
which the intersection is the one closest to the surface vertex, was
used, a no entry indicates that the other intersection was
used.
For the cuf, a nonzero
value indicates a Fresnel surface.
The ccf refers to
whether the cuf is a variable when optimized; the values
and their meanings are the same as those for the k control
code.
The coefficients A, B, C,
and D are the fourth, sixth, eighth, and tenth polynomial
aspheric sag coefficients, respectively, to the conic constant. The
codes ac–dc, like the k control code, indicate
whether the coefficients are variables when optimized; the values and
their meanings are the same as those for the k control
code.
Table 2
Lens Data for the Hypercomatic (Immersion)
Objectivea
Current Lens Surface with Respect to the Object (>obj)
Aspheric Coefficients A, B, C, and D and Codes ac, bc, cc, and dc for Lens Surface 4
Lens Surface
Coefficients
Coefficient Code
A
B
C
D
ac
bc
cc
dc
4
0.000000 × 100
-313517 × 10-11
0.000000 × 100
0.000000 × 100
100
0
100
100
Illuminator Specification Data
Entrance pupil diameter (epd)
150.00000 mm
Wavelength (wl)
363.789 nm
Field angles in the x direction (xan)
0.00000°
0.00000°
Paraxial Image
Field angles in the y direction (yan)
0.25000°
-0.25000°
Height (ht)
0.1818 mm
Upper vignetting factor in the y direction (vuy)
0.00000
0.00000
Angle (ang)
0.2500°
Lower vignetting factor in the y direction (vly)
0.00000
0.00000
Entrance Pupil
Infinite Conjugates
Diameter (dia)
150.0000 mm
Effective focal length (efl)
63.4941 mm
Thickness (thi)
0.0000 mm
Back focal length (bfl)
1.0006 mm
Exit Pupil
Front focal length (ffl)
60.8890 mm
Diameter (dia)
102.6521 mm
f-Number (fno)
0.2778
Thickness (thi)
44.4526 mm
Image distance (img dis)
1.0000 mm
Overall length (oal)
155.4195 mm
The labels and names used in this table
correspond to those used in code v; for clarity,
abbreviations (in small capitals) have been included in parentheses
following some entries. See Table 1 footnotes for particular
definitions and explanations of values.
Refractive indices are given at the design
wavelength of 363.789 nm.