Abstract

Null ellipsometry is analyzed for components with depolarizations for unpolarized incident light. Serious imperfections include sample depolarization $\mathcal{D}$ < 0.2, misalignment (δC < 2°) and off-quarter-wave retardance (δτ < 5°) of the compensator. The four-zone null positions are derived analytically to the second order of serious imperfections and are also simulated based on Mueller matrices with depolarization. Errors of all four-zone nulls increase with increasing $\mathcal{D}$. Depolarizations of all components except the analyzer cause errors to the nulls. The errors associated with $\mathcal{D}$ always couple with the second order of δC and δτ and are enhanced by csc² 2ψ. These divergent errors limit the applicable region of null ellipsometry where the errors in ψ and Δ are within 0.1°, and the simulation agrees well with the analytic solutions.

© 1999 Optical Society of America

Depolarization and principal Mueller matrix measured by null ellipsometry

Soe-Mie F. Nee
Appl. Opt. 40(28) 4933-4939 (2001)

Error reductions for a serious compensator imperfection for null ellipsometry

Soe-Mie F. Nee
J. Opt. Soc. Am. A 8(2) 314-321 (1991)

Error analysis for Mueller matrix measurement

Soe-Mie F. Nee
J. Opt. Soc. Am. A 20(8) 1651-1657 (2003)

Errors of Mueller matrix measurements with a partially polarized light source

Soe-Mie F. Nee
Appl. Opt. 45(25) 6497-6506 (2006)

Polarization of specular reflection and near-specular scattering by a rough surface

Soe-Mie F. Nee
Appl. Opt. 35(19) 3570-3582 (1996)