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Chemical cleaving method of relief microstructure formation on dichromated gelatin

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Abstract

A chemical cleaving method to improve the resolution of relief modulation in dichromated gelatin is presented. The process (which uses hydroxylamine) yields higher relief resolution and better profile fidelity than a process that uses the enzyme trypsin because it has many fewer cleaving sites. Experiments prove that relief modulation can produce a resolution of as much as 500 lines/mm. With a projection exposure system, a microprism array with a 30-µm-wide, 0.8-µm-high cell is fabricated by this method. A method for forming a continuous relief on dichromated gelatin is also discussed.

© 2000 Optical Society of America

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