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Single device for laser source measurements from the ultraviolet to the far infrared

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Abstract

We propose a new device, based on an array of micromechanical cantilevers, that measures both the wavelength and the optical power of a laser source with constant efficiency over a large spectral interval from the ultraviolet to the far infrared. To measure the wavelength, the thickness of the cantilevers must vary linearly along the array. The characteristics of this device are calculated, and an example is given for the design of an array of Si cantilevers that cover the 0.33–11-µm spectral range.

© 2000 Optical Society of America

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Equations (12)

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