Abstract
A fiber bundle has been designed for measurement of gas concentrations in a chemical vapor deposition (CVD) chamber. The bundle is broadband, covering the spectrum range from 500 to 6000 cm-1. Using this bundle, we have designed Fourier Transform infrared (FTIR) sampling configurations with reduced beam divergence (from 0.4 to 0.1 rad) and focal spot diameters (from 12 to 4 mm). The FTIR spectrum of tetraethoxysilane vapors in a CVD chamber was determined with the bundle and modified SAM connectors. An ellipsoid reflector was designed that yielded improved signal-to-noise ratios (SNR’s) in the fiber-based spectra by a factor of 2. The incorporation of this reflector in spectrometers by use of the fiber bundle has the potential to reduce the sampling times for spectra while retaining acceptable SNR’s.
© 2000 Optical Society of America
Full Article | PDF ArticleMore Like This
Osnat Eytan, Ben-Ami Sela, and Abraham Katzir
Appl. Opt. 39(19) 3357-3360 (2000)
E. Rave, L. Nagli, and A. Katzir
Opt. Lett. 25(17) 1237-1239 (2000)
Matthew T. Parsons, Ihor Sydoryk, Alan Lim, Thomas J. McIntyre, John Tulip, Wolfgang Jäger, and Karen McDonald
Appl. Opt. 50(4) A90-A99 (2011)