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Graded reflectivity micromirror arrays

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Abstract

A technique for fabricating arrays of graded reflectivity micromirrors with diameters as small as 25 µm is reported. It is based on laser-induced physical vapor deposition through microholes on a thin free-standing noncontact mask, and it is suitable for applications in micro-optics and solid-state laser technology.

© 2002 Optical Society of America

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