Abstract
The total loss that can be suffered by an antireflection (AR) coating consists of reflectance loss, absorption loss, and scatter loss. To separate these losses we developed a calorimetric absorption measurement apparatus and an ellipsoidal Coblentz hemisphere based scatterometer for 157-nm optics. Reflectance, absorption, and scatter of AR coatings were measured with these apparatuses. The AR coating samples were supplied by Japanese vendors. Each AR coating as supplied was coated with the vendor’s coating design by that vendor’s coating process. Our measurement apparatuses, methods, and results for these AR coatings are presented here.
© 2002 Optical Society of America
Full Article | PDF ArticleMore Like This
Shunsuke Niisaka, Tadahiko Saito, Jun Saito, Akira Tanaka, Akira Matsumoto, Minoru Otani, Ryuji Biro, Chidane Ouchi, Masanobu Hasegawa, Yasuyuki Suzuki, and Kazuho Sone
Appl. Opt. 41(16) 3242-3247 (2002)
Stefan Gliech, Jörg Steinert, and Angela Duparré
Appl. Opt. 41(16) 3224-3235 (2002)
Sven Schröder, Stefan Gliech, and Angela Duparré
Appl. Opt. 44(29) 6093-6107 (2005)