Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Black layer coatings for the photolithographic manufacture of diffraction gratings

Not Accessible

Your library or personal account may give you access

Abstract

A black layer coating for an aluminum–photoresist interface with a reflectance less than 0.1% for 413-nm, s-polarized light incident at 25° is described. It is made of space-compatible materials, and its rms roughness is less than 15 Å.

© 2002 Optical Society of America

Full Article  |  PDF Article
More Like This
Ion-beam etching for the precise manufacture of optical coatings

Daniel Poitras, J. A. Dobrowolski, Tom Cassidy, and Simona Moisa
Appl. Opt. 42(19) 4037-4044 (2003)

Topical Meeting on Optical Interference Coatings (OIC’2001): manufacturing problem

J. A. Dobrowolski, Stephen Browning, Michael Jacobson, and Maria Nadal
Appl. Opt. 41(16) 3039-3052 (2002)

Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm

Benjawan Sae-Lao, Saša Bajt, Claude Montcalm, and John F. Seely
Appl. Opt. 41(13) 2394-2400 (2002)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (2)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved