Abstract

An optimization method for the sensitivity of diffraction efficiency measurements is presented. I define the sensitivity as the estimation precision of the grating parameters. The optimization method called sensitivity analysis for fitting scans all the possible measurement configurations and selects the configuration that yields the best sensitivity. The scan is made over the domain of the experimental parameters of the arrangement, such as the azimuth angle of the grating and the orientation angles of the analyzer and the polarizer. These parameters can be freely varied, and among the multitude of possible combinations there is one configuration that provides optimum sensitivity. Comparison with experimental results reveals a qualitative agreement between theory and practice.

© 2002 Optical Society of America

Phase-modulation scatterometry

Petre C. Logofătu
Appl. Opt. 41(34) 7187-7192 (2002)

Analytical estimation of the parameters of autodyne lidar

Gennady A. Koganov, Reuben Shuker, and Evgueni P. Gordov
Appl. Opt. 41(33) 7087-7091 (2002)

Scatterometry specialized for a highly asymmetric triangular grating on a transparent substrate

Lin Yang, Lijiang Zeng, and Lifeng Li
Appl. Opt. 53(6) 1143-1150 (2014)

Application of measurement configuration optimization for accurate metrology of sub-wavelength dimensions in multilayer gratings using optical scatterometry

Jinlong Zhu, Yating Shi, Lynford L. Goddard, and Shiyuan Liu
Appl. Opt. 55(25) 6844-6849 (2016)

Grating-based real-time polarization phase-shifting interferometry: error analysis

Qian Kemao, Wu Xiaoping, and Anand Asundi
Appl. Opt. 41(13) 2448-2453 (2002)