Abstract

We describe a laser interferometric system in which two objectives are used to measure surface profile on a connectorized fiber-end surface. By the use of the proposed illumination design a He-Ne laser as a point light source is transformed to an extended light source, which is beneficial to localize interference fringe pattern near the test surface. To obtain an optimal contrast of the interference fringe pattern, the flat mirror with an adjustable reflection ratio is used to suit different test surfaces. A piezoelectric transducer attached on the reference mirror can move precisely along the optical axis of the objective and permits implementation of four-step phase-shifting interferometry without changing the relative position between the CCD sensor and the test surface. Therefore, an absolutely constant optical magnification can be accurately kept to capture the interference fringe patterns resulting from a combination of light reflected from both the reference flat mirror and the test surface. The experimental result shows that surface profile on a fiber-end with surface features such as a small fiber diameter of 125 μm and a low reflection ratio of less than 4% are measurable. Measurements on a standard calibration ball show that the accuracy of the proposed setup is comparable with that of existing white-light interferometers and stylus profilometers.

© 2004 Optical Society of America

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