Abstract

UV-induced self-volume growth of the hybrid sol-gel glass was investigated for fabrication of an arbitrary-surface relief structure with a user-defined gray scale mask. The gray scale mask was generated through exposure of a high-energy beam-sensitive glass under an electron beam. Saw-tooth gratings of different periods were fabricated by a simple UV exposure through the gray-scale mask. Experimental results showed that the smaller the period is, the shallower the depth obtained owing to the self-volume growth effect is.

© 2004 Optical Society of America

UV induced controllable volume growth in hybrid sol-gel glass for fabrication of a refractive microlens by use of a grayscale mask

Weixing Yu and X.-C. Yuan
Opt. Express 11(18) 2253-2258 (2003)

Cost-effective fabrication of microlenses on hybrid sol-gel glass with a high-energy beam–sensitive gray-scale mask

X.-C. Yuan, W. X. Yu, N. Q. Ngo, and W. C. Cheong
Opt. Express 10(7) 303-308 (2002)

Single-step fabrication of continuous surface relief micro-optical elements in hybrid sol-gel glass by laser direct writing

W. X. Yu, X. -C. Yuan, N. Q. Ngo, W. X. Que, W. C. Cheong, and V. Koudriachov
Opt. Express 10(10) 443-448 (2002)

Volume growth initiated by point-to-point ultraviolet-laser direct writing in hybrid solgel glass for three-dimensional microfabrication

Weixing Yu and X.-C. Yuan
Opt. Lett. 28(17) 1573-1575 (2003)

Fabrication of refractive microlens in hybrid SiO₂/TiO₂ sol-gel glass by electron beam lithography

W. X. Yu and X.-C. Yuan
Opt. Express 11(8) 899-903 (2003)