Abstract

Defocused speckle correlation is introduced as a tool for measuring the response in metal sheets during percussion laser drilling. For this procedure the fourth-harmonic Nd:YAG wavelength (266 nm) was used in pulsed mode. The method provides a cost-efficient and robust alternative to speckle interferometry for the study of the small deformations that appear during laser processing. The accuracy was shown to be of the order of a few tens of microradians for the tilt component that is measured, which translates to a few nanometers in deflection when the component is spatially integrated. In the measurements, deflections in the form of craters as large as 50 nm were detected on the back sides of silver and copper sheets. The diameters of the craters were 300 µm in the silver and 150 µm in the copper sheet; the output diameter of the hole was ∼5 µm.

© 2005 Optical Society of America

Investigation of laser percussion hole drilling by use of speckle correlation

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