Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

Hyug-Gyo Rhee; Theodore V. Vorburger; Jonathan W. Lee; Joseph Fu

doi:10.1364/AO.44.005919

Applied Optics
Vol. 44,
Issue 28,
pp. 5919-5927
(2005)
•https://doi.org/10.1364/AO.44.005919

Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry

Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu

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Hyug-Gyo Rhee, Theodore V. Vorburger, Jonathan W. Lee, and Joseph Fu, "Discrepancies between roughness measurements obtained with phase-shifting and white-light interferometry," Appl. Opt. 44, 5919-5927 (2005)

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Abstract

Discrepancies between phase-shifting and white-light interferometry have been observed in step-height and surface roughness measurements. The discrepancies have a strong relation to the roughness average parameter of the surface. The skewing effect, which mainly occurs in the vicinity of peaks, valleys, and edges of the sample, causes this problem in white-light interferometry of step height. For roughness, two possible sources of the discrepancy are considered.

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Specifications	Instrument 1	Instrument 2
Detector type	736 × 480 CCD camera	736 × 480 CCD camera
Nominal sampling space	0.413 μm with 20× objective	0.413 μm with 20× objective
	0.165 μm with 50× objective	0.165 μm with 50× objective
Year of manufacture	1999 (software upgrade: 2001)	2003 (software upgrade: 2003)
Vertical resolution	3 Å for PSI	3 Å for PSI
	3 nm for WLI with single measurement	3 nm for WLI with single measurement

	Speciman Number

Specimen Information	1	2	3	4	5	6	7
Nominal step height (nm)	8	18	20	44	68	88	88
Nominal width (μm)	100	100	25	100	25	100	100
PSI (nm)	8.28 (0.23)	17.55 (0.69)	20.05 (0.30)	46.63 (0.56)	67.54 (0.28)	91.23 (0.31)	99.04 (0.57)
WLI (nm)	8.54 (2.11)	17.33 (2.95)	21.71 (5.15)	46.45 (4.97)	71.13 (6.68)	91.05 (5.58)	98.09 (6.80)
Difference (WLI-PSI)	0.26	−0.22	1.66	−0.18	3.59	−0.18	−0.95

Specimen	Sample Identification	Nominal Ra Value (nm)	Measured Ra Value using Stylusa (nm)	Other Specifications	Measured RΔq Value Using Stylusb (sampling interval 1 μm) (mrad)
Random	Veeco smooth mirror	<0.1 (vertical resolution of PSI)	0.16 (measured with PSI)	—
	Rubert 501	15	14.0	—	37.4
	Rubert 502	34	34.5	—	38.3
	Rubert 503	90	88.4	—	83.9
	Rubert 504	130	129.7	—	108.5
Sinusoidal gratings	Sample 3	60	58.9	6.6 μm spatial wavelength, 180 nm peak–valley	—
	Rubert 529	105	102.6	10 μm spatial wavelength, 330 nm peak–valley	78.2
	SRM2071	300	321.7	100 μm spatial wavelength, 1.2 μm peak–valley	42.8
	Rubert 528	502	506.24	50 μm spatial wavelength, 1.6 μm peak–valley	78.4
Periodic cusp shape	No. 00635	100	105.57	40 μm spatial wavelength, 400 nm peak–valley	—

Specifications	Instrument 1	Instrument 2
Detector type	736 × 480 CCD camera	736 × 480 CCD camera
Nominal sampling space	0.413 μm with 20× objective	0.413 μm with 20× objective
	0.165 μm with 50× objective	0.165 μm with 50× objective
Year of manufacture	1999 (software upgrade: 2001)	2003 (software upgrade: 2003)
Vertical resolution	3 Å for PSI	3 Å for PSI
	3 nm for WLI with single measurement	3 nm for WLI with single measurement

	Speciman Number

Specimen Information	1	2	3	4	5	6	7
Nominal step height (nm)	8	18	20	44	68	88	88
Nominal width (μm)	100	100	25	100	25	100	100
PSI (nm)	8.28 (0.23)	17.55 (0.69)	20.05 (0.30)	46.63 (0.56)	67.54 (0.28)	91.23 (0.31)	99.04 (0.57)
WLI (nm)	8.54 (2.11)	17.33 (2.95)	21.71 (5.15)	46.45 (4.97)	71.13 (6.68)	91.05 (5.58)	98.09 (6.80)
Difference (WLI-PSI)	0.26	−0.22	1.66	−0.18	3.59	−0.18	−0.95

Abstract

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Tables (3)

Equations (8)

Applied Optics