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Photonic devices based on preferential etching

Bob Bellini, Jean-François Larchanché, Jean-Pierre Vilcot, Didier Decoster, Romeo Beccherelli, and Antonio d’Alessandro

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Abstract

We introduce a design concept of optical waveguides characterized by a practical and reproducible process based on preferential etching of crystalline silicon substrates. Low-loss waveguides, spot-size converters, and power dividers have been obtained with polymers. We have also aligned liquid crystals in the waveguides and demonstrated guided propagation. Therefore this technology is a suitable platform for soft-matter photonics and heterogeneous integration.

© 2005 Optical Society of America

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