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Multiple-wave lateral shearing interferometry for wave-front sensing

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Abstract

Multiple-wave achromatic interferometric techniques are used to measure, with high accuracy and high transverse resolution, wave fronts of polychromatic light sources. The wave fronts to be measured are replicated by a diffraction grating into several copies interfering together, leading to an interference pattern. A CCD detector located in the vicinity of the grating records this interference pattern. Some of these wave-front sensors are able to resolve wave-front spatial frequencies 3 to 4 times higher than a conventional Shack–Hartmann technique using an equivalent CCD detector. Its dynamic is also much higher, 2 to 3 orders of magnitude.

© 2005 Optical Society of America

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