Abstract
A method for determining the optical constants and the thickness of weakly absorbing thin
films on substrates is proposed. In this method only the reflectance and transmittance spectra
obtained at a single arbitrary angle of incidence are used, provided that the former reveals
several interference extrema. The calculation procedure is based on relatively simple
relations suitable for the programmed realization and does not call for the prescription of
the initial values of the parameters to be determined. The method proposed is fairly
accurate and allows one to uniquely solve the inverse problem of spectrophotometry. The
optical constants and the thickness of an AsxSey film formed on a glass substrate have been
determined by the proposed method in the visible region of the spectrum.
© 2006 Optical Society of America
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