Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Light coupling into an optical microcantilever by an embedded diffraction grating

Not Accessible

Your library or personal account may give you access

Abstract

By measuring the excitation efficiency of an optical waveguide on a diffraction grating one can accurately register the changes in the incidence angle of the exciting light beam. This phenomenon was applied to detect ultrasmall deflections of silicon dioxide cantilevers of submicrometer thickness that were fabricated with corrugation on top to act as diffraction grating couplers. The power of light coupled into the cantilevers was monitored with a conventional photodetector and modulated using mechanical vibration of the cantilever, thus changing the spatial orientation of the coupler with respect to the incident light beam. The technique can be considered as an alternative to the methods known for detection of cantilever deflection.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
White LED light coupling into light guides with diffraction gratings

Samuli Siitonen, Pasi Laakkonen, Pasi Vahimaa, Markku Kuittinen, and Noora Tossavainen
Appl. Opt. 45(12) 2623-2630 (2006)

Integrated optic glass microcantilevers with Bragg grating interrogation

Lewis G. Carpenter, Christopher Holmes, Helen L. Rogers, Peter G.R. Smith, and James C. Gates
Opt. Express 18(22) 23296-23301 (2010)

Diffraction grating couplers milled in Si3N4 rib waveguides with a focused ion beam

Kirill E. Zinoviev, Carlos Dominguez, and Anna Vilà
Opt. Express 13(21) 8618-8624 (2005)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (9)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (1)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (6)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved