Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

Not Accessible

Your library or personal account may give you access

Abstract

A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4  μm. The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001–0.002 for small values. Examples are given for aluminum, rutile (TiO2), and calcite (CaCO3).

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Transmission two-modulator generalized ellipsometry measurements

Gerald E. Jellison, C. Owen Griffiths, David E. Holcomb, and Christopher M. Rouleau
Appl. Opt. 41(31) 6555-6566 (2002)

Two-modulator generalized ellipsometry: experiment and calibration

G. E. Jellison and F. A. Modine
Appl. Opt. 36(31) 8184-8189 (1997)

Two-modulator generalized ellipsometry: theory

G. E. Jellison and F. A. Modine
Appl. Opt. 36(31) 8190-8198 (1997)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (3)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (3)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (52)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved