Abstract
A method for the determination of the optical constants of thin films based on the combination of a waveguide measurement procedure with the spectroscopic measurements made from the UV to the IR is presented. As a test material AlN thin film on sapphire substrates is investigated.
© 2006 Optical Society of America
Full Article | PDF ArticleMore Like This
Vitaly P. Kutavichus, Valery V. Filippov, and Vitali H. Huzouski
Appl. Opt. 45(19) 4547-4553 (2006)
Jonghoon Baek, Desiderio Kovar, John W. Keto, and Michael F. Becker
Appl. Opt. 45(7) 1627-1639 (2006)
Valentin Panayotov and Ivan Konstantinov
Appl. Opt. 30(19) 2795-2800 (1991)