Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

F2-laser-machined submicrometer gratings in thin dielectric films for resonant grating waveguide applications

Not Accessible

Your library or personal account may give you access

Abstract

Surface-relief gratings with submicrometer modulation periods were ablated by F2-laser radiation in thin metal-oxide films to produce resonant grating waveguide structures. For 150  nm films of Nb2O 5, grating amplitudes in the range of 5–50  nm could be reproducibly excised with a controlled exposure of a laser energy density and a number of pulses within a narrow processing window. Resonant coupling of 800 nm ultrashort pulsed laser light into the resulting grating waveguide structure is verified with reflection and transmission spectra and satisfactorily modeled by coupled-mode theory. The laser-fabricated grating waveguides are attractive for high damage threshold reflectors and biosensor applications.

© 2006 Optical Society of America

Full Article  |  PDF Article
More Like This
Fabrication and characterization of epitaxial Ba0.7Sr0.3TiO3 thin films for optical waveguide applications

Dan-Yang Wang, Helen Lai Wa Chan, and Chung Loong Choy
Appl. Opt. 45(9) 1972-1978 (2006)

Direct light-coupling to thin-film waveguides using a grating-structured GRIN lens

Thomas Fricke-Begemann and Jürgen Ihlemann
Opt. Express 18(19) 19860-19866 (2010)

Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling

Kalyani Chaganti, Ildar Salakhutdinov, Ivan Avrutsky, Gregory W. Auner, and John Mansfield
Opt. Express 14(4) 1505-1511 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (5)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved