Abstract

We propose and demonstrate a new technique for fast noncontact and continuous profile measurement of a rough surface. The technique is based on frequency tracking of the power modulation of spatially filtered scattered light. A dynamic speckle pattern is created when the laser beam scans the surface under study. The main advantage of the proposed technique is high scanning speed, which provides an extremely short response time of the distance sensor ($<0.1\mu \text{s}$). Parameters that affect accuracy and resolution of the system are analyzed. Possible ways for further improvement of the measurements accuracy are discussed.

© 2006 Optical Society of America

Fast distance measurements by use of dynamic speckles

Dmitry V. Semenov, Ervin Nippolainen, and Alexei A. Kamshilin
Opt. Lett. 30(3) 248-250 (2005)

Distance sensing to rough semitransparent and multiscattering materials using dynamic speckles

Dmitry Semenov, Igor Sidorov, and Ervin Nippolainen
Appl. Opt. 48(28) 5266-5273 (2009)

Accuracy of measuring systems using dynamic speckles

Serguei V. Miridonov, Igor Sidorov, Ervin Nippolainen, and Alexei A. Kamshilin
J. Opt. Soc. Am. A 26(4) 745-753 (2009)

Statistical properties of dynamic speckles formed by a deflecting laser beam

D. V. Semenov, S. V. Miridonov, E. Nippolainen, and A. A. Kamshilin
Opt. Express 16(2) 1238-1249 (2008)

Fiber-optic sensor for distance and velocity measurements using speckle dynamics

Yoichi Kitagawa and Akihiro Hayashi
Appl. Opt. 24(7) 955-959 (1985)