Abstract
A novel inorganic–organic hybrid silica–zirconia solgel material, which can generate thick film in a single spin-coatingprocess, has been developed and employed in the fabrication of an embedded dielectric channel waveguide on a silica buffer layer of a silicon substrate. The fabricated channel waveguide core had steep ridge walls, good smoothness, and high robustness, and the novel sol synthesisenabled a precise control of the geometrical and optical parameters of the embedded dielectric channel waveguide. In the telecommunication window, the fundamental modes and in the embedded channel waveguide had low transmission losses of and , respectively.
© 2007 Optical Society of America
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