Abstract
A new, to the best of our knowledge, method, which combines the multistep ion-etching method with a traditional narrowband filter coating technique, is developed to prepare a two-chamber integrated multichannel filter. The influence of film deposition and etch technique on the shape and height of the narrow transmittance peaks is analyzed. A 32-channel narrowband integrated filter is fabricated with a homemade ion-etching machine and a coating machine. Every channel is distinctly separated and the FWHM is 1% of its central wavelength. The feasibility of the technique will be useful in the fabrication of a higher integrated multichannel narrowband filter.
© 2007 Optical Society of America
Full Article | PDF ArticleMore Like This
Zhanshan Wang, Tian Sang, Li Wang, Hongfei Jiao, Yonggang Wu, Jingtao Zhu, Lingyan Chen, Shao-Wei Wang, Xiaoshuang Chen, and Wei Lu
Appl. Opt. 47(13) C1-C8 (2008)
D. R. Gibson and P. H. Lissberger
Appl. Opt. 22(2) 269-281 (1983)
Virginie Nazabal, Michel Cathelinaud, Weidong Shen, Petr Nemec, Frédéric Charpentier, Hervé Lhermite, Marie-Laure Anne, Jérémie Capoulade, Fabien Grasset, Alain Moreac, Satoru Inoue, Miloslav Frumar, Jean-Luc Adam, Michel Lequime, and Claude Amra
Appl. Opt. 47(13) C114-C123 (2008)