Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Design and fabrication of diffractive microlens arrays with continuous relief for parallel laser direct writing

Not Accessible

Your library or personal account may give you access

Abstract

Diffractive microlens arrays with continuous relief are designed, fabricated, and characterized by using Fermat’s principle to create an array of spots on the photoresist-coated surface of a substrate for parallel laser direct writing. Experimental results indicate that a diffraction efficiency of 71.4% and a spot size of 1.97μm (FWHM) can be achieved at normal incidence and a writing laser wavelength of 441.6nm with an array of F/4 fabricated on fused silica, and the developed array can be used to improve the utilization ratio of writing laser energy.

© 2008 Optical Society of America

Full Article  |  PDF Article
More Like This
Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication

Michael R. Wang and Heng Su
Appl. Opt. 37(32) 7568-7576 (1998)

Zone-boundary optimization for direct laser writing of continuous-relief diffractive optical elements

Victor P. Korolkov, Ruslan K. Nasyrov, and Ruslan V. Shimansky
Appl. Opt. 45(1) 53-62 (2006)

References

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (7)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Equations (4)

You do not have subscription access to this journal. Equations are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Metrics

Select as filters


Select Topics Cancel
© Copyright 2022 | Optica Publishing Group. All Rights Reserved